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CVD & Converter Process Technology
Process Technology for Silicon Production
Poly Plant Project (PPP) provides our customers with an advanced, proven technology package for high yield, high purity silicon production. The silicon production process technology package contains two (2) components: Reactor Building Configuration and Polysilicon Formation by Trichlorosilane (TCS) Decomposition Technology. PPP’s technology has been implemented at multiple plants successfully.
Reactor Building Layout
Through experience at multiple polysilicon plants, PPP developed an optimized building, piping, and equipment layout design. PPP’s design reduces the capital expense (Capex) by minimizing the footprint required per kilogram of polysilicon produced. PPP’s design also reduces the operating expense (Opex) by efficiently locating equipment and piping to minimize the turn-around time during each Reactor cycle.
Polysilicon Formation by Trichlorosilane (TCS) Decomposition:
The production of polysilicon is a batch process. For ease of understanding, the following overview describes conditions during the deposition phase, when the Reactor is in operation.
Unreacted gases, consisting of TCS, Silicontetrachloride (STC), hydrogen, and anhydrous hydrogen chloride (HCl) are removed from the Reactor. This high temperature effluent gas mixture is sent through an off-gas cooling system and then sent to a Vent Gas Recovery (VGR) system for recycle. The vent gases are recycled and reused.